发明名称 Method for producing water-resistant aluminum nitride powder
摘要 Provided is a method for producing a water-resistant aluminum nitride powder capable of adding a good water-resistant property to an aluminum nitride powder wherein yttria exists on a particle surface. The method is for producing a water-resistant aluminum nitride powder by carrying out a treatment to a particle surface of an aluminum nitride powder, the method including the successive steps of (i) making an aluminum nitride powder contact with an acid solution wherein yttria exists at least on a particle surface of the aluminum nitride powder; and (ii) making the aluminum nitride powder contact with a phosphorous acid compound, wherein the amount of yttria which is extracted when the aluminum nitride powder is filtered, washed with water, and dried after the step (i) and is thereafter subjected to extraction with 1 mol/L hydrochloric acid is no more than 1000 mg per 100 g of the aluminum nitride powder.
申请公布号 US9399577(B2) 申请公布日期 2016.07.26
申请号 US201314423522 申请日期 2013.09.06
申请人 TOKUYAMA CORPORATION 发明人 Tamagaki Megumu;Kanechika Yukihiro
分类号 H01L23/373;C01B21/072 主分类号 H01L23/373
代理机构 Ladas & Parry LLP 代理人 Ladas & Parry LLP
主权项 1. A method for producing a water-resistant aluminum nitride powder by surface treatment of aluminum nitride powder particles having yttria on a surface thereof as a result of a production process thereof, the method comprising the successive steps of: (i) making an aluminum nitride powder contact with an acid solution which can dissolve yttria, wherein yttria exists at least on a particle surface of the aluminum nitride powder; (ii) removing the acid from the aluminum nitride powder; and (iii) making the aluminum nitride powder contact with a phosphorus acid compound, wherein an amount of yttria which remains on the surface of the aluminum nitride powder after the step (i) is determined by carrying out the following successive steps of (a) to (e) on the aluminum nitride powder filtered, washed with water, and dried after the step (i) and is no more than 1000 mg per 100 g of the aluminum nitride powder filtered, washed with water, and dried: (a) adding 10 g of the aluminum nitride powder filtered, washed with water, and dried to 25 mL of 1 mol/L hydrochloric acid in a 50 mL vial bottle at 25° C.;(b) holding the vial bottle in a ultrasonic bath and sonicating the vial bottle at 43 kHz for 30 minutes at 25° C.;(c) filtering the content of the vial bottle and thereby obtaining a filtrate;(d) measuring yttrium content in the filtrate by means of inductively coupled plasma atomic emission spectrometry; and(e) converting the yttrium content in the filtrate into the content in terms of yttria.
地址 Shunan-shi, Yamaguchi JP