| 摘要 |
PURPOSE:To remove the influence of noises of a waviness component, temperature drift, etc., by providing a memory stored with measurement data in XY array, a data array extracting means, and a reference surface calculating means. CONSTITUTION:A measuring instrument 400 is constituted by arranging a sample table 401 where a sample to be measured is mounted and a height measurement system 402 which measures the height of the sample on the sample table opposite each other and the both are put in scanning operation in two directions X and Y crossing each other at right angles in a plane perpendicular to a height direction Z to measure a three-dimensional image of the sample surface. Then the memory 406 is stored with measurement data 405 in XY array obtained by the measurement and a data array extracting means 407 extracts specified X-directional data array and Y-directional data array from said data. Further, the reference surface calculating means 408 generates data 409 on a reference surface according to the X-directional data array and Y-directional data array. Consequently, data 409 on the reference surface including noises of the waving component, temperature drift, etc., is obtained. The surface shape and ruggedness state centering on the reference surface can be decided, so a measurement result after the noises are removed is obtained. |
