ELECTROSTATIC CHUCK CAPABLE OF RAPIDLY DECHUCKING A SUBSTRATE

摘要

An electrostatic chuck (20) for holding a substrate (12) comprises a dielectric (70) having a receiving surface (75) for receiving the substrate thereon. The dielectric (70) comprises a charging electrode (80) for generating electrostatic charge for electrostatically holding the substrate (12) to the receiving surface (75), and a discharge electrode (85) electrically isolated from the charging electrode for removing electrostatic charge accumulated in the chuck (20).