发明名称 METHOD OF DETACHING THIN-FILM DEVICE, METHOD OF TRANSFERRING THIN-FILM DEVICE, THIN-FILM DEVICE, ACTIVE MATRIX SUBSTRATE, AND LIQUID CRYSTAL DISPLAY
摘要 <p>A separation layer (120) is provided on a substrate (100), and a thin-film device (140), such as a TFT, is fabricated on the substrate. During the fabrication process of the thin-film device (140), detachment promoting ions, for example, hydrogen ions are injected into the separation layer (120). After fabricating the thin-film device (140), the thin-film device (140) is joined to a transferrer (180) preferably through an adhesive layer (160), and then a laser beam is projected from the substrate side. In such a way, in the separation layer (120), detachment is caused to occur by utilizing the action of detachment promoting ions, detaching the thin-film device (140) from the substrate (100). Thus, a desired thin-film device can be transferred onto any type of substrate.</p>
申请公布号 WO1999044242(P1) 申请公布日期 1999.09.02
申请号 JP1999000818 申请日期 1999.02.23
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