COOLING SYSTEM WITH ANTIFREEZE FOR COOLING MAGNETRON FOR PROCESS CHAMBER OF PROCESSING SYSTEM

摘要

A vacuum processing system has a process chamber with a rotating member, such as a magnetron in a PVD chamber, disposed in a cooling chamber containing a free oxygen deficient cooling fluid that circulates into and out of the cooling chamber. The free oxygen deficient cooling fluid may be an ethylene-glycol based coolant or antifreeze. Conduits connect an inlet and an outlet of the cooling chamber to a heat exchanger to cool and re-circulate the free oxygen deficient cooling fluid.