| 发明名称 |
SLIP FREE VERTICAL RACK DESIGN HAVING ROUNDED HORIZONTAL ARMS |
| 摘要 |
The invention relates to a vertical rack for semiconductor wafer processing having strictly horizontally disposed arms wherein each arm has a rounded tip and a smooth (Ra < 1 .mu.m) upper surface.
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| 申请公布号 |
CA2318968(A1) |
申请公布日期 |
1999.09.02 |
| 申请号 |
CA19992318968 |
申请日期 |
1999.02.19 |
| 申请人 |
SAINT-GOBAIN INDUSTRIAL CERAMICS, INC. |
发明人 |
HENGST, RICHARD R. |
| 分类号 |
H01L21/683;H01L21/22;H01L21/31;H01L21/673;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/683 |
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