发明名称 Halbleitervorrichtung und entsprechendes Herstellungsverfahren
摘要 The invention relates to a semiconductor device, comprising a first gate-controlled MOS component (100) with a first gate isolator (150) which is orientated in a first direction and a second gate-controlled MOS component (200) with a second gate isolator (250) which is orientated in a second direction different from the first, the first and second gate isolators (150; 250) having been epitaxially grown at the same time, with the same step. The first and second directions are selected to the effect that the thickness (d2) of the second gate isolator (250) is considerably greater than the thickness (d1) of the first gate isolator (150).
申请公布号 DE19807776(A1) 申请公布日期 1999.09.02
申请号 DE19981007776 申请日期 1998.02.24
申请人 SIEMENS AG 发明人 ZIMMERMANN, ULRICH;BOEHM, THOMAS;HAIN, MANFRED;KOHLHASE, ARMIN;OTANI, YOICHI;RUSCH, ANDREAS;TRUEBY, ALEXANDER
分类号 H01L21/8234;H01L27/06;H01L27/088;(IPC1-7):H01L27/112;H01L21/824 主分类号 H01L21/8234
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