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发明名称
METHOD FOR MANUFACTURING A POLYCRYSTALLINE LAYER ON A SUBSTRATE
摘要
申请公布号
KR100217147(B1)
申请公布日期
1999.09.01
申请号
KR19900009694
申请日期
1990.06.29
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
BERTAGNOLLI, EMMERICH;KABZA, HERBERT
分类号
C23C14/14;C23C14/58;C23C16/24;C23C16/56;H01L21/02;H01L21/20;H01L21/321;H01L21/324;(IPC1-7):C23C16/24
主分类号
C23C14/14
代理机构
代理人
主权项
地址
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