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发明名称
FORMING METHOD FOR METAL FILM OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100219053(B1)
申请公布日期
1999.09.01
申请号
KR19960024651
申请日期
1996.06.27
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
HONG, SANG-KI;OH, SAE-JUN
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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