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发明名称
VERTICAL DIFFUSION FURNACE OF MANUFACTURING SEMICONDUCTOR WAFER
摘要
申请公布号
KR200156807(Y1)
申请公布日期
1999.09.01
申请号
KR19960049186U
申请日期
1996.12.14
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
KIM, HYEONG-SHIK
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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