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发明名称
SEMICONDUCTOR WAFER CLAMP
摘要
申请公布号
KR200156146(Y1)
申请公布日期
1999.09.01
申请号
KR19960035190U
申请日期
1996.10.24
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
JANG, IN-KWEON;KIM, HAK-WON;KWEON, SUN-HU
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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