FARADAY VOLTAGE MONITORING APPARATUS OF ION IMPLANTER,申请号KR19960041608U-传众专利搜索

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发明名称	FARADAY VOLTAGE MONITORING APPARATUS OF ION IMPLANTER
摘要
申请公布号	KR200156736(Y1)	申请公布日期	1999.09.01
申请号	KR19960041608U	申请日期	1996.11.22
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	IM, TAE-SEOB
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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