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经营范围
发明名称
SPIN WASHING METHOD
摘要
申请公布号
KR100220028(B1)
申请公布日期
1999.09.01
申请号
KR19960017458
申请日期
1996.05.22
申请人
TOKYO ELECTRON LIMITED
发明人
UENO, KINYA
分类号
B08B3/02;H01L21/00;(IPC1-7):H01L21/304
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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