Ink jet head and method of manufacturing thereof

摘要

An ink jet head 10 has nozzle holes 4, emitting chamber 6 respectively connected thereto, and vibrating plates 5 are formed at the bottom wall of the emitting chambers 6. A common ink cavity 8 is adapted to supply ink to the emitting chambers through orifices 7. Electrodes 21 are placed so as to face the vibrating plates so as to drive the vibrating plates by static electricity. One of two anode bonding faces between the first substrate 1 forming the vibrating plate 5 and the second substrate 2 forming the electrode has a dent 15 to form a vibrating chamber 9 or a dent 25 for mounting an electrode therein, or SiO2 membranes 41 and 42, respectively formed therein. The gap length G between the vibrating plate and the electrode is determined to be between 0.05 - 2 mu m.