| 摘要 |
PROBLEM TO BE SOLVED: To enable reduction in the movement time of a bonding tool within an allowable range, coinciding with the movement locus with a preset locus, and shortening of a set time for the shape parameter of a wire loop. SOLUTION: A position response x(t) is calculated from a position command X(t) of an X-axis according to an X-axis transfer function Gx and estimated 41. A Z-axis position response z(t) is calculated such that the relationship with the estimated position response x(t) becomes a predetermined locus, and a position command Z(t) for obtaining the position response z(t) is inversely calculated 43 with the use of a Z-axis inverse transfer function G<-1> z). The same procedure is similarly carried out for a Y-axis. These position commands are given to a driver to have it perform wire-loop forming operation. |
