PROBE END CLEANING SHEET,申请号JP19980056234-传众专利搜索

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发明名称	PROBE END CLEANING SHEET
摘要
申请公布号	JPH11238768(A)	申请公布日期	1999.08.31
申请号	JP19980056234	申请日期	1998.02.20
申请人	JAPAN ELECTRONIC MATERIALS CORP	发明人	OKUBO MASAO;NISHIZAKI SHUNICHIRO;FURUSAKI SHINICHIRO;SAKATA TERUHISA
分类号	G01R1/06;B24B29/04;B24D3/22;B24D11/00;G01R31/28;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R1/06
代理机构		代理人
主权项
地址

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