发明名称 FLATTENING METHOD AND FLATTENING DEVICE TO BE USED THEREFOR
摘要 PROBLEM TO BE SOLVED: To always perform stable flattening, instantly correcting or setting an optimum shape on the side of a device according to working shapes of a body to be worked and secular fluctuation of the shape of the body to be worked, even when there are many desired working shapes of the body to be worked and secular fluctuation of the shape of the body to be worked due to deformation of a device itself is generated. SOLUTION: On the rear surface of a revolving working machine 11, each heater 12 and a heat insulating layer 13 covering these heaters 12 are arranged. When current-carrying amount to the heaters 12 is controlled, the working machine 11 deforms according to the heat generation amount, the surface profile of a working surface 11a is changed from flatness → a center recess and also the surface profile of a body 14 to be worked revolving according to this change is changed from flatness → a center projection. Conversely, by directly heating the body 14 to be worked by using the heaters 12 or indirectly heating the body 14 to be worked through a body to be worked holding member, the body 14 to be worked may be thermally deformed.
申请公布号 JPH11235658(A) 申请公布日期 1999.08.31
申请号 JP19980056211 申请日期 1998.02.20
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 TANAKA KOICHI;MORITA KOJI
分类号 B24B37/015;B24B37/04;B24B37/12;B24B37/22;B24B37/30;H01L21/304 主分类号 B24B37/015
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