EQUIPMENT AND METHOD FOR PROCESSING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing equipment which is able to carry substrates arranged at different pitches without using a device dedicated for changing the pitch. SOLUTION: A substrate carrier robot assembled in a substrate processing equipment is provided with a pair of holding rods 36. The holding rods 36 are so structured that they are separated from each other and are opened or closed in X directions as shown by arrows 33S by means of the main body of the robot and are also made to be rotated around each axis 34 as shown by an arrow 33R. The holding rods 36 are regular hexagonal and have recesses 361 of a first pitch P1 on each ridgeline. At the time of carrying a substrate, and holding rods 36 are rotated and moved according to the arrangement conduction and processing to be conducted of the substrates which is to be carried. By this method, substrates arranged at the first pitch P1 or at a second pitch P2 which is twice the first pitch P1 can be carried.