| 发明名称 |
Chemical mechanical polisher |
| 摘要 |
A chemical, mechanical polisher having a plurality of cylindrical rollers rotating orthogonally to a rotating work piece that they wipe and cover that are conditioned to uniformly receive a cleaning agent for polishing the work piece.
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| 申请公布号 |
US5944588(A) |
申请公布日期 |
1999.08.31 |
| 申请号 |
US19980104473 |
申请日期 |
1998.06.25 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
MARMILLION, PATRICIA M.;PALAGONIA, ANTHONY M. |
| 分类号 |
B24B37/04;(IPC1-7):B24B7/00 |
主分类号 |
B24B37/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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