发明名称 DETECTION METHOD OF ORIENTATION FLAT NOTCH AND POSITIONING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To easily detect the position of an orientation flat or a notch in ingot. SOLUTION: A piece of ingot (In) is rotated around an ingot axis. A rotating angleθdeg. of the ingot is detected. The rotating angle of the ingot is measured from a point, where an edge E1 of orientation flat passes at a detection point (P), to a point, where another edge E2 of orientation flat will pass at the detection point (P). When the edge E2 of orientation flat reaches the detection point (P), the rotation of the ingot is stopped. In this case, a position ofθdeg./2 from the detection point (P) in the rotating direction is detected as the position of the orientation flat(OF).</p>
申请公布号 JPH11238707(A) 申请公布日期 1999.08.31
申请号 JP19980130593 申请日期 1998.05.13
申请人 TOKYO SEIMITSU CO LTD 发明人 SUZUKI YOSHIYUKI;EHASHI MASAO
分类号 H01L21/68;H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/68
代理机构 代理人
主权项
地址