| 摘要 |
<p>PROBLEM TO BE SOLVED: To make measurable a electrostatic adhesion force and a non- electrostatic adhesion force. SOLUTION: After a fine particle is allowed to adhere to a supporting substrate 21 from a sample substrate where the fine particle is allowed to adhere by a centrifugation device, a gas is blown from a nozzle 29 by a compressor 32, a fine particle on the supporting substrate 21 is separated, the amount of electric charge on the supporting substrate is measured by an electric charge measuring device 28. By obtaining the amount of electric charge per fine particle from the number of fine particles adhering to the adhesion surface of the supporting substrate 21 that is measured in advance and the amount of electric charge, the relationship between the amount of electric charge and the adhesion force is obtained and the electrostatic adhesion force and the nonstatic adhesion force of the fine particle can be obtained.</p> |
