ULTRAMICRO DEVICE EQUIPPED WITH MEANS CAPABLE OF REPAIRING FASTENED MOVABLE PART AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To enable an ultramicro device to recover its movable part from stiction, by a method wherein a functional device is equipped with a movable part on a board, and a part of the movable part fastened to the board is heated by a heating element so as to separate the movable part fastened to the board from the board. SOLUTION: A device 1 is equipped with a cantilever 3 formed on a board 2, and an electric power is applied to electrodes to operate the cantilever 3. When the cantilever 3 is fastened to the board 2 or a stiction occurs between the cantilever 3 and the board 2, a current is applied to a resistor 4 through the electrodes 5a and 5b. When the part of the cantilever 3 fastened to the board 2 is heated, thermal vibrations are generated in a crystal lattice on the surface of the part of the cantilever 3 fastened to the board 2. Atoms fastened to each other are separated from each other by thermal oscillations, and, as a result, the cantilever 3 is separated from the board 2. As mentioned above, a micro device equipped with a movable part such as a micro machine is provided with a repairing means for recovering the movable part from stiction, whereby the movable part can be easily repaired without an expensive equipment.