METHOD AND APPARATUS FOR MEASUREMENT OF WAVE FRONT,申请号JP19980057561-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MEASUREMENT OF WAVE FRONT
摘要
申请公布号	JPH11237311(A)	申请公布日期	1999.08.31
申请号	JP19980057561	申请日期	1998.02.23
申请人	CANON INC	发明人	KONOUCHI OSAMU
分类号	G01B9/02;G01B11/24;G01M11/02;(IPC1-7):G01M11/02	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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