| 摘要 |
An angular rate sensor comprises an oscillator excited for oscillation in x-direction, a movable electrode disposed in opposing relationship with a stationary electrode along z-direction, and a movable electrode support for transmitting the oscillation of the oscillator in the z-direction to the movable electrode while interrupting the transmission of the oscillation in the x-direction, and is formed by a micromachining operation. The movable electrode support includes an oscillator support beam continuing from the oscillator and extending in y-direction, an electrode support beam continuing from the oscillator support beam and extending in the x-direction, and a connector stem extending in the x-direction form the electrode support beam and connected to the movable electrode at a position which represents the center of gravity of the movable electrode. When a turning force about the y-axis is applied to the oscillator, Coriolis force is produced and causes the oscillator to undergo an elliptical motion, depicting an ellipse on an x-z plane. The electrode support beam and the oscillator support beam interrupt the x-component of the elliptical oscillation while transmitting only the z-component to the movable electrode. An electrical circuit connected to the movable electrode produces an electrical signal representing the z-component of the oscillation.
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