发明名称 |
Wafer restraining device |
摘要 |
A wafer restraining device clips onto a semiconductor wafer cassette. The wafer restraining device is provided with at least one opening to allow bubbles forming during acid baths on excess resist-covered semiconductor wafers to escape. Portions of the wafer restraining device only contact the periphery of the sensitive, disc-shaped semiconductor wafers.
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申请公布号 |
US5944038(A) |
申请公布日期 |
1999.08.31 |
申请号 |
US19970985818 |
申请日期 |
1997.12.05 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
HORTON, STEPHEN D.;MARIAM, THEODROS W. |
分类号 |
H01L21/673;(IPC1-7):B08B3/00 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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