发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To provide a thin film transistor which enables increase in oncurrent and reduction in source/drain resistance, and a method for its manufacture. SOLUTION: The gate electrode 61 of a thin film transistor and the gate electrode 45 of a bulk transistor are placed on both sides of a semiconductor layer 51 to be the channel region of the thin film transistor. The source/drain regions 57, 57a of the thin film transistor are in direct contact with the semiconductor layer, and are formed into a sidewall shape on both the sides of the gate electrodes with the an insulating layer in-between.
申请公布号 JPH11238889(A) 申请公布日期 1999.08.31
申请号 JP19980271107 申请日期 1998.09.25
申请人 LG SEMICON CO LTD 发明人 SOKKU WAN ZO
分类号 H01L21/8234;H01L21/22;H01L21/336;H01L21/822;H01L21/8244;H01L27/06;H01L27/088;H01L27/11;H01L29/786;(IPC1-7):H01L29/786 主分类号 H01L21/8234
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