发明名称 Stratified composite dielectric and method of fabrication
摘要 An interconnect platform and its method of fabrication is presented. The interconnect platform of the present invention includes a metal conductor, a dielectric layer, and a buffer layer separating at least one interface between the conductor and the dielectric layer when the buffer has a lower modulus of elasticity than the dielectric layer.
申请公布号 US5945203(A) 申请公布日期 1999.08.31
申请号 US19970949984 申请日期 1997.10.14
申请人 ZMS LLC 发明人 SOANE, DAVID S.
分类号 B32B15/08;B32B25/04;H05K1/02;H05K3/00;H05K3/38;H05K3/46;(IPC1-7):B32B9/00;B32B15/06 主分类号 B32B15/08
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