ALIGNER FOR WAFER AND CONTACTOR

摘要

PROBLEM TO BE SOLVED: To enable quick and accurate alignment of all contactors of a contact body for inspection and wafer electrodes corresponding to them. SOLUTION: This aligner has a first camera 28 for picking up the image of a contactor 50 on the aligner main body, a moving body provided with a wafer mounting body 40, a driving mechanism 23 for moving the moving body in the X, Y, Z andθdirections, a controller for controlling the movement distance of the moving body in each direction, a second camera 31 to pickup up the image of the wafer W on the moving body, and a memory for storing imaging position data received from both the cameras 28 and 31. Based on the positions obtained from both cameras, bumps and electrode pads are made to coincide with each other by the controller.