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发明名称
COMPOUND SEMICONDUCTOR SUBSTRATE AND ELIMINATING METHOD OF DEFECTIVE COMPOUND SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH11238772(A)
申请公布日期
1999.08.31
申请号
JP19980040324
申请日期
1998.02.23
申请人
DAIDO STEEL CO LTD
发明人
YASUURA KENJI
分类号
G01B11/30;G01N21/88;G01N21/93;G01N21/956;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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