DEFECT INSPECTION DEVICE,申请号JP19980336865-传众专利搜索

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发明名称	DEFECT INSPECTION DEVICE
摘要
申请公布号	JPH11237225(A)	申请公布日期	1999.08.31
申请号	JP19980336865	申请日期	1998.11.27
申请人	HITACHI LTD	发明人	TOMITA KOJI;MAEJIMA MUNEO;KODAMA YOSHITAKA;KOMURO HITOSHI;MATSUI SHIGERU;TAKEDA KAZUO
分类号	G01B11/30;G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01B11/30	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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