| 摘要 |
This invention relates to an improved method of fabricating silicon microparticles (5, 10, 12, 18, 20, 23, 26), each microparticle (5, 10, 12, 18, 20, 23, 26) carrying a machine readable binary code in the form of holes (2, 3, 6, 13, 15, 17, 24, 27), pits, or other optically identifiable marks. The microparticles (5, 10, 12, 18, 20, 23, 26) may be manufactured in sizes from a few tens of micrometres up to millimetres in linear dimension and simultaneously manufactured in numbers of up to the order of one million from a single silicon wafer (1, 4, 16), depending upon particle size. The process of manufacture is based upon direct etching of silicon wafers (1, 4, 16). Microparticles (5, 10, 12, 18, 20, 23, 26) of a few tens of micrometres length and breadth, which are essentially invisible to the naked eye, may be manufactured by this process for use in security and anti-counterfeiting applications of valuable goods, paper currency, etc. Larger particles (5, 10, 12, 18, 20, 23, 26) of up to several hundred micrometres in length and breadth which additionally carry a quantity of appropriate combinatorial chemistry support polymer resin (11, 14, 19, 21, 25, 29) in the form of a layer or a bead may be made for use in combinatorial compound library (CCL) synthesis. |
