| 摘要 |
PURPOSE:To always detect a correct temperature of a heater by providing a fixing wire to connect the heater and a thermocouple munually. CONSTITUTION:A temperature measuring point 9a of a thermocouple 9 is disposed near a heater 1 to be connected to the heater 1 with a fixing wire 10. The fixed wire 10 is made of either of material composing the thermocouple 9 and one end thereof is welded to the measuring point 9a while the other end thereof is joined or hooked on a knit of the heater 1. Temperature of the heater 1 is detected with the thermocouple 9 and the current temperature detection signal is sent to a control circuit 12 through an insulating circuit 11. The circuit 12 has a temperature rising program corresponding to purposes of measurement stored and the temperature detection signal sent is compared with the temperature rising program. The circuit 12 regulates a current control circuit 14 disposed in a feeder circuit 13 based on the results of comparison to control a current flowing to the heater 1. The fixing wire serves to maintain an interval constant between the temperature measuring point 9a and the heater 1.
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