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发明名称
Apparatus and method for the face-up surface treatment of wafers.
摘要
申请公布号
GB2334470(A)
申请公布日期
1999.08.25
申请号
GB19990004259
申请日期
1999.02.24
申请人
* SPEEDFAM CORPORATION
发明人
JOSEPH V * CESNA
分类号
B24B1/00;B24B37/04;H01L21/304;(IPC1-7):B24B37/04
主分类号
B24B1/00
代理机构
代理人
主权项
地址
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