| 摘要 |
<p>A piezoelectric/electrostrictive device in which a fixing plate (31) is joined a connection plate (33) each other at their sides, a diaphragm (32) with a piezoelectric element (35) set on one plane of it is joined to the connection plate (33) at their sides in the direction perpendicular to the direction of joining between the fixing plate (31) and the connection plate (33), at least some sides of the connection plate (33) and the diaphragm (32) are joined to a substrate (34). A voltage is applied to the piezoelectric element (35) to displace the fixing plate (31) or the displacement amount of the fixing plate (31) is measured by measuring the electromotive force of the piezoelectric element (35) according to the displacement. The piezoelectric/electrostrictive device converts electrical energy into mechanical energy such as mechanical displacement, force, or vibration and vice versa, and thus it is preferably used as a vibrator, resonator, oscillator, or discriminator for communication or motive power or as an ultrasonic sensor or acceleration sensor. <IMAGE> <IMAGE> <IMAGE></p> |
