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发明名称
CHARGED PARTICLE SOURCE
摘要
申请公布号
EP0937307(A1)
申请公布日期
1999.08.25
申请号
EP19970912857
申请日期
1997.10.22
申请人
VEECO INSTRUMENTS INC.
发明人
DRUZ, BORIS, L.;HAYES, ALAN, V.;KANAROV, VICTOR;DISTEFANO, SALVATORE, A.;LAKIOS, EMMANUEL, N.
分类号
H01J27/16;H01J37/08;(IPC1-7):H01J27/16
主分类号
H01J27/16
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代理人
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