Minimising watermarks on silicon substrates,申请号EP19980306889-传众专利搜索

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发明名称	Minimising watermarks on silicon substrates
摘要
申请公布号	EP0902460(A3)	申请公布日期	1999.08.25
申请号	EP19980306889	申请日期	1998.08.27
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION;SIEMENS AKTIENGESELLSCHAFT	发明人	AKATSU, HIROYUKI;HOYER, RONALD;RAMACHANDRAN, RAVIKUMAR
分类号	H01L21/304;H01L21/306;(IPC1-7):H01L21/306	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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