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发明名称
QUARTZ GLASS SUBSTRATE
摘要
申请公布号
JPH11228160(A)
申请公布日期
1999.08.24
申请号
JP19980038245
申请日期
1998.02.20
申请人
SUMIKIN SEKIEI KK
发明人
NAKAMURA TETSUYUKI
分类号
G02F1/1333;C03B20/00;H01L29/786;(IPC1-7):C03B20/00;G02F1/133
主分类号
G02F1/1333
代理机构
代理人
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地址
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