摘要 |
The read only memory has a plurality of conductor track planes one above the other. The conductor tracks in adjacent planes are oriented such that they intersect in intersecting regions. In these intersecting regions, either a VIA tunnel contact is provided, which represents a logic "1" or no VIA tunnel contact is provided, so that this intersecting region represents a logic "0". In this way, over the same surface area, a plurality of memory cells can be produced one above the other. The read only memory is produced with a defined sequence of process steps and it is operated by selectively applying predetermined voltages across the various conductor tracks.
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