发明名称 |
Computer-implemented inter-chamber synchronization in a multiple chamber substrate processing system |
摘要 |
A computer-implemented method of achieving inter-chamber synchronization in a system for integrated circuit manufacturing that includes first and second chambers. In particular, the disclosed method includes terminating a second operation in a second recipe carried out in the second chamber, upon termination of a first operation in a first recipe carried out in the first chamber. Performance advantages realized by the method are illustrated for various cases including 1) a variable-length first operation; 2) a fixed-length first operation; 3) a process first recipe; 4) a conditioning first recipe; 5) a process second recipe; and 6) a conditioning second recipe.
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申请公布号 |
US5943230(A) |
申请公布日期 |
1999.08.24 |
申请号 |
US19960770625 |
申请日期 |
1996.12.19 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RINNEN, KLAUS-DIETER;CZARNIK, CORY |
分类号 |
H01L21/677;G05B15/02;H01L21/00;H01L21/02;H01L21/31;(IPC1-7):G05B11/01 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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