| 摘要 |
PCT No. PCT/JP96/00554 Sec. 371 Date Sep. 3, 1997 Sec. 102(e) Date Sep. 3, 1997 PCT Filed Mar. 7, 1996 PCT Pub. No. WO96/27473 PCT Pub. Date Sep. 12, 1994A laser marking device for forming the pattern printed on a liquid crystal mask on the surface of an object. In the laser marking device, an input optical system (20) and an output optical system (30) are positioned on the input surface side of a reflective liquid crystal element (5) on which the laser beam (L) is made to fall through the input optical system (20). The angle of incident of the laser beam (L) on the input surface of the element (5) is approximately 90 DEG . The laser beam (L) reflected by the element (5) is directed to the object (15) through the optical system (30). A cooling means (17) which cools the element (5) is provided in contact with the surface of the element (5) opposite to the surface which the laser beam strikes. In such a way, the space for the optical systems (20) and (30) is reduced. The space occupied by the cooling means (17) is reduced and the cooling efficiency and cooling uniformity of the means (17) are improved because the means (17) is in direct contact with the element (5).
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