| 摘要 |
<p>PROBLEM TO BE SOLVED: To work a conductive film without requiring a waste water treatment at a low cost and suitable for the production of many kind in small quantities by selectively irradiating conductive film formed on the surface of an insulation substrate with a laser beam and removing a part of the conductive film. SOLUTION: A conductive film 4 which consists of a transparent material (ITO) on an insulation substrate 3 made of a transparent plastic material (e.g. PET or the like), is selectively irradiated with a near ultrared laser beam emitted from a Q switch control TAG laser 1 through an optical system 2 constituting of a mirror etc. The insulation substrate 3 is fixed on an X-Y stage 5 integrating a linear motor and is made movable in the horizontal direction. The YAG laser 1 and the X-Y stage 5 are controlled by a controller 6. Thus, by controlling a drive part of the YAG laser 1, the repeating period, the pulse width etc., of the laser beam are changed, according to the output of the laser beam from the YAG laser 1, the X-Y stage 5 is drive-controlled and the insulation substrate 3 is moved.</p> |
