发明名称 Integrated circuits formed in radiation sensitive material and method of forming same
摘要 A transistor device 10 is disclosed herein. A doped layer 14 of a radiation sensitive material is formed over a substrate 12. The radiation sensitive material 14 may be polyimide, polybenzimidazole, a polymer, an organic dielectrics, a conductor or a semiconductor and the substrate 12 may be silicon, quartz, gallium arsenide, glass, ceramic, metal or polyimide. A neutral (undoped) layer 16 of radiation sensitive material is formed over the doped layer 14. First and second source/drain regions 18 and 20 are formed in the neutral layer 16 and extend to a top portion of the doped layer 14. A gate region 22 is formed in a top portion of the neutral layer 16 between the first source/drain region 18 and second source/drain region 20 such that a channel region 24 is formed in the doped layer 14 beneath the gate region 22.
申请公布号 US5942374(A) 申请公布日期 1999.08.24
申请号 US19970871026 申请日期 1997.06.06
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 SMAYLING, MICHAEL C.
分类号 G03F1/00;G03F1/14;G03F7/00;G03F7/09;H01L51/00;H01L51/30;H01L51/40;H05K1/16;(IPC1-7):G03F7/00 主分类号 G03F1/00
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