| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage device provided with a holding mechanism able to correspond even to larger acceleration and larger sized substrate. SOLUTION: A stage holding a substrate 101 to be moved in a prescribed direction and a mechanism applying force in accordance with acceleration, when the stage is moved, to act in the substrate from a direction of acceleration are provided. The mechanism has a counter mass 102 movable in a direction including a moving direction component of the stage and a member making moment by the counter mass 102 act in the substrate 101. Further, the member has a lever 103 supported by a hinge mechanism 105, one end of the lever 103 is connected to the counter mass 102, and force is additionally added to one side of the substrate by the other end.</p> |
