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发明名称
FILM FORMING DEVICE
摘要
申请公布号
JPH11229134(A)
申请公布日期
1999.08.24
申请号
JP19980052752
申请日期
1998.02.18
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
NAGANUMA KATSUYOSHI;SONODA TSUTOMU;KAMIYA AKIRA;KATO MAKOTO
分类号
C23C14/34;C23C14/50;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
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