| 摘要 |
PROBLEM TO BE SOLVED: To achieve efficient grinding work by using a surface plate for grinding consisting of a formed body for grinding which is composed of a specific compound and has a bulk density, BET specific surface area, and average grain diameter in specific scopes and an accompanying member. SOLUTION: A surface plate part of a grinding device is mainly made of silica (silicon dioxide) and consists of a formed body for grinding 2 having a bulk density of 0.2 to 1.5 g/cm<3> , BET specific surface area of 10 to 400 m<2> /g, and average grain diameter of 0.001 to 0.5 μm and an accompanying member 6. At the time of grinding, it can be applied to a grinding and machining process of a substrate material, etc., using grinding fluid containing no free abrasive grains because a surface of the formed body for grinding 2 is a rough surface due to silica powders which are a material thereof and a material to be ground 1 comes into contact with the rough surface directly. Furthermore, the number of particles of the formed body which drop is reduced greatly, and a problem of waste liquid is eliminated. Moreover, the durability of the grinding device can be increased in the grinding and machining process because the strength of the formed body for grinding is high. |
