发明名称 |
Micro mechanical component and production process thereof |
摘要 |
A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.
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申请公布号 |
US5943555(A) |
申请公布日期 |
1999.08.24 |
申请号 |
US19970954307 |
申请日期 |
1997.10.17 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
SHIOMI, HIROMU;NISHIBAYASHI, YOSHIKI;SHIKATA, SHIN-ICHI |
分类号 |
B81B3/00;B81C1/00;G01C19/56;G01H3/08;G01H11/00;G01H11/06;G01L9/00;G01P15/08;G01P15/125;G01Q70/14;(IPC1-7):H01L21/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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