OPTICAL NONDESTRUCTIVE INSPECTION OF QUARTZ CRUCIBLE AND APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an optical nondestructive inspection method of a quartz crucible by observing presence of foam which exists on inner surface of a quartz crucible by using optical detection means and detecting the foam with image treating means and provide an apparatus therefor. SOLUTION: Light fed from a light source 1 is irradiated into a quartz crucible which is a test specimen and irradiated light is pictured and observed by an image taking-in optical system 2 in which an optical camera, etc., is loaded and image treatments such as binarization, comprehensive quadrangular calculation and outline extract are carried out by using the image to detect and determine foam which exists in the vicinity of the inner surface.