| 摘要 |
PROBLEM TO BE SOLVED: To improve the smoothness by forming a plurality of slurry passages in a bottom fringe part of a hold ring and arranging the slurry passages at substantially equal interval. SOLUTION: A hold ring 40 is formed in such a way that it has a plurality of slurry passages, paths, namely, pipe passages 42. This slurry passage 42 can be formed as a lower groove of the hold ring 40, a groove or a pipe passage through the hold ring or a space having the other shape. For example, a plurality of straight grooves arranged at substantially equal interval around the hold ring 60 are formed. In this case, while grinding is done, the hold ring 40 rotates at a predetermined speed and these straight grooves 42 are directed in such a manner that they form an acute angle of attack for slurry supplied from the outside of the hold ring 40. For this reason, it is possible to circulate slurry smoothly on a surface of a wafer on an inner side of the hold ring 40 by supplying slurry through the hold ring 40 due to the assistance of the straight grooves 42. |
