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发明名称
Pb/Bi enthaltende Oxide von hohen Dielektrizitätskonstanten unter Verwendung von Perovskiten als Pufferschicht, die keine Pb/Bi enthalten
摘要
申请公布号
DE69325614(D1)
申请公布日期
1999.08.19
申请号
DE1993625614
申请日期
1993.04.29
申请人
TEXAS INSTRUMENTS INC.
发明人
SUMMERFELT, SCOTT R.
分类号
C23C14/08;H01L21/02;H01L21/28;H01L21/314;H01L21/316;H01L21/8242;H01L27/108;H01L29/51;H05K1/03;(IPC1-7):H01L21/314;H01L29/94;H01L29/43
主分类号
C23C14/08
代理机构
代理人
主权项
地址
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