发明名称 Verfahren zum Strukturieren einer transparenten, elektrisch leitfähigen Schicht
摘要 <p>The invention relates to a method for structuring a transparent or semi-transparent electroconductive oxidic layer on an insulating substrate in a reliable, cost-efficient, environmentally friendly manner involving a relatively small amount of equipment. According to the inventive method, the layer is brought into contact with the tip of a needle. Voltage is applied between the layer and the needle and the tip of the needle is guided along the layer surface according to a given model. A groove is made in the layer, leaving the substrate uncovered.</p>
申请公布号 DE19715048(C2) 申请公布日期 1999.08.19
申请号 DE1997115048 申请日期 1997.04.11
申请人 ROBERT BOSCH GMBH 发明人 GROTHE, WOLFGANG;HUEPPAUFF, MARTIN
分类号 H01L21/3213;H01L31/18;H01L51/52;(IPC1-7):H01L21/321;H01L51/20;H05B33/14;H01L21/304;H01L33/00 主分类号 H01L21/3213
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