发明名称 |
Verfahren zum Strukturieren einer transparenten, elektrisch leitfähigen Schicht |
摘要 |
<p>The invention relates to a method for structuring a transparent or semi-transparent electroconductive oxidic layer on an insulating substrate in a reliable, cost-efficient, environmentally friendly manner involving a relatively small amount of equipment. According to the inventive method, the layer is brought into contact with the tip of a needle. Voltage is applied between the layer and the needle and the tip of the needle is guided along the layer surface according to a given model. A groove is made in the layer, leaving the substrate uncovered.</p> |
申请公布号 |
DE19715048(C2) |
申请公布日期 |
1999.08.19 |
申请号 |
DE1997115048 |
申请日期 |
1997.04.11 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
GROTHE, WOLFGANG;HUEPPAUFF, MARTIN |
分类号 |
H01L21/3213;H01L31/18;H01L51/52;(IPC1-7):H01L21/321;H01L51/20;H05B33/14;H01L21/304;H01L33/00 |
主分类号 |
H01L21/3213 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|